ARTÍCULO

Autor(es)

V. Romero, L. Layeillon, J. Oseguera,

Registrado por
Año

1996

Tipo de artículo

Aceptado con arbitraje

Título de artículo

MODELING OF CONCENTRATION DISTRIBUTIONS OF ACTIVE SPECIES DURING PLASMA NITRIDING

Volúmen

01

Número de registro

6

Campo

LOGICA

Disciplina

LOGICA INDUCTIVA

Subdisciplina

OTROS

Resumen

The reactivity of nitrogen depends on the excitation of the nitrogen molecules. The vibrational energy of the neutral species in the fundamental electronic state depends on the energy transfer during collisions. A self consistent model has been developed to calculate the isoconcentration regions of neutral and excited species within the positive column of a weakly ionized plasma. The model considers the collisions between electrons and nitrogen molecules (e-v) and between molecules (v-v) as the excitation mechanisms, and assumes a mass balance for the generation and extinction of species within the reactor. In this work, the effect of the e-v mechanism is evaluated with respect to the combined effect of the (e-v and v-v) mechanisms based on the results for the excitation and distribution of species obtained with the model.

URL (DOI, ORCID, HANDLE, enlace)
Fuente

Sistema Estatal de Información y Documentación Científica y Tecnológica

Número de Visitas

20

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