V. Romero, L. Layeillon, J. Oseguera,
1996
Aceptado con arbitraje
MODELING OF CONCENTRATION DISTRIBUTIONS OF ACTIVE SPECIES DURING PLASMA NITRIDING
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LOGICA
LOGICA INDUCTIVA
OTROS
The reactivity of nitrogen depends on the excitation of the nitrogen molecules. The vibrational energy of the neutral species in the fundamental electronic state depends on the energy transfer during collisions. A self consistent model has been developed to calculate the isoconcentration regions of neutral and excited species within the positive column of a weakly ionized plasma. The model considers the collisions between electrons and nitrogen molecules (e-v) and between molecules (v-v) as the excitation mechanisms, and assumes a mass balance for the generation and extinction of species within the reactor. In this work, the effect of the e-v mechanism is evaluated with respect to the combined effect of the (e-v and v-v) mechanisms based on the results for the excitation and distribution of species obtained with the model.
Sistema Estatal de Información y Documentación Científica y Tecnológica
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